Handbook of Silicon Based MEMS Materials and Technologies

e-Book & Magazine. October 13, 2010 by d3pz4i.

Handbook of Silicon Based MEMS Materials and Technologies
William Andrew | 2010 | ISBN: 0815515944 | 700 pages | PDF | 14,3 MB

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.
Key topics covered include:

Silicon as MEMS material
Material properties and measurement techniques
Analytical methods used in materials characterization
Modeling in MEMS
Measuring MEMS
Micromachining technologies in MEMS
Encapsulation of MEMS components
Emerging process technologies, including ALD and porous silicon

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  • [13-10-2010]
  • Yang
  • [4 November 2011 10:36]
very good

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